Parylene is a good protective material for advanced devices like micro-electromechanical systems (MEMS).  The breakdown voltage of Parylene film with thickness of 5 µm can go up to 1,000 V or higher which makes it the excellent dielectric material suitable for MEMS.  In addition, good penetration of Parylene molecules may enter into crevice with opening smaller than 1 µm providing a high-quality, pinhole-free protective film around the component.  It is an excellent barrier to protect devices against acids, alkalis, chemical solvents, as well as the corrosive environmental elements, such as moisture and salinity.

While the devices become smaller and complex, Parylene serves as a good candidate material offering ultra-thin protection to enhance reliability and service life.